Waferpedia

Comparison ledger

DSU versus MX 61 L F 300 MM

Olympus DSU and Olympus MX 61 L F 300 MM, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
DSUOlympus
MX 61 L F 300 MMOlympus
OEMOlympusOlympus
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyOlympus DSUOlympus MX 61
Specifications
Configurationon a IX81 stand[1]14x12 stage[2]
Option—Lumenera Infinity 2-3C, 3.3 megapixel Digital CCD Camera with PC and software[2]
DSU entryMX 61 L F 300 MM entry

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing