Waferpedia

Olympus

DSU

Metrology & InspectionOlympus DSU family
Research Quality: 30% complete
DSU — Inventory photo
Fig. 01DSUInventory photo[1]

What is it?

Olympus DSU is a microscope configured on an IX81 stand with motorized Z drive, filter cube, objective turret, Prior arc lamp and xenon light source, and a Windows 7 computer running Slidebook.

What do the numbers mean?

Optics & imaging2

Objective turret[1]
Accurate?
Objectives:[1]
Accurate?

Control & software1

Windows 7 computer running slidebook[1]
Accurate?

Configuration & options16

on a IX81 stand[1]
Accurate?
Motorized z drive[1]
Accurate?
Filter cube[1]
Accurate?
Prior arc lamp and xenon light source (for calcium imaging)[1]
Accurate?
Images captured with Hamatsu EMCCD C9100-23B[1]
Accurate?
100x UPLANAPO[1]
Accurate?
100x UPLFLN 100x[1]
Accurate?
10x UplanSApo NA 0.4[1]
Accurate?
40x UplanSAPO NA 0.9[1]
Accurate?
40x UAPO N340 NA 1.35[1]
Accurate?
20x UplanSApo NA 0.75[1]
Accurate?
20x UplanApo NA 0.7 Ph2[1]
Accurate?
20x UPlan FLN NA 0.5 Ph1[1]
Accurate?
60x Plan Apo N NA 1.42[1]
Accurate?
60x PlanApo Ph2 NA 1.4[1]
Accurate?
4x UplanSapo NA 0.16[1]
Accurate?
Interested in this tool?
Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the DSU are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DSU are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DSU are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DSU are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DSU are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DSU is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →