Waferpedia

Comparison ledger

DSX1000 versus MX80

Olympus DSX1000 and Olympus MX80, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DSX1000Olympus
MX80Olympus
OEMOlympusOlympus
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyOlympus DSX1000Olympus MX80
Specifications
ManufacturerOlympus[1]
ModelDSX1000[1]
Tool name in listDigital Microscope #7[1]
SectionOptical Microscopy[1]
Objectives1.25x, 5x, 10x, 20x, 50x, and 100x[2]
Eyepiece10x binocular eyepiece[2]
CameraOptronics MagnaFire camera with capture software[2]
Image analysis softwareImagePro Plus[2]
Dark field imagingAvailable for 5x through 100x objectives[2]
Nomarski imagingIncluded for 5x through 100x objectives[2]
IlluminationTop and bottom illumination[2]
UV filterFor imaging photoresist[2]
OutputPhoto printer[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
  2. [2]nanofab.ece.cmu.edunanofab.ece.cmu.edu