Comparison ledger
Olympus MX80 and Olympus OLS5000, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | MX80Olympus | OLS5000Olympus |
|---|---|---|
| OEM | Olympus | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Olympus MX80 | Olympus OLS5000 |
| Specifications | ||
| Objectives | 1.25x, 5x, 10x, 20x, 50x, and 100x[1] | — |
| Eyepiece | 10x binocular eyepiece[1] | — |
| Camera | Optronics MagnaFire camera with capture software[1] | — |
| Image analysis software | ImagePro Plus[1] | — |
| Dark field imaging | Available for 5x through 100x objectives[1] | — |
| Nomarski imaging | Included for 5x through 100x objectives[1] | — |
| Illumination | Top and bottom illumination[1] | — |
| UV filter | For imaging photoresist[1] | — |
| Output | Photo printer[1] | — |
| Equipment type | — | optical microscope[2] |
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