Waferpedia

Comparison ledger

MX80 versus scope1

Olympus MX80 and Olympus scope1, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
MX80Olympus
scope1Olympus
OEMOlympusOlympus
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyOlympus MX80Olympus scope1
Specifications
Objectives1.25x, 5x, 10x, 20x, 50x, and 100x[1]5x, 20x, 50x, 100x, and 150x objectives on motorized turret[2]
Eyepiece10x binocular eyepiece[1]
CameraOptronics MagnaFire camera with capture software[1]
Image analysis softwareImagePro Plus[1]
Dark field imagingAvailable for 5x through 100x objectives[1]
Nomarski imagingIncluded for 5x through 100x objectives[1]
IlluminationTop and bottom illumination[1]
UV filterFor imaging photoresist[1]
OutputPhoto printer[1]
VendorOlympus[2]
ModelMX61A[2]
PurposeSemiconductor microscope for sample inspection and documentation[2]
Observation methodsBrightfield and darkfield[2]
Stage focusMotorized stage focus[2]
Digital imagingSteam Motion software for calibrated measurements[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]nanofab.ece.cmu.edunanofab.ece.cmu.edu
  2. [2]uwaterloo.cauwaterloo.ca