Waferpedia

Comparison ledger

100 Plus Nitride versus 800 Plus

Oxford Instruments 100 Plus Nitride and Oxford Instruments 800 Plus, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
100 Plus NitrideOxford Instruments
800 PlusOxford Instruments
OEMOxford InstrumentsOxford Instruments
CategoryDepositionDeposition
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyOxford Instruments Plasmalab 800
Specifications
ManufacturerOxford[1]
Model100 Plus[1]
ProcessNitride deposition[1]
Configuration50/60 Hz[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing