Waferpedia

Comparison ledger

100 Plus Nitride versus Ion Beam

Oxford Instruments 100 Plus Nitride and Oxford Instruments Ion Beam, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
100 Plus NitrideOxford Instruments
Ion BeamOxford Instruments
OEMOxford InstrumentsOxford Instruments
CategoryDepositionDeposition
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyOxford Instruments Ion Beam
Specifications
ManufacturerOxford[1]
Model100 Plus[1]
ProcessNitride deposition[1]
ConfigurationDC Hot Wire Filament Ion-Guns[2]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing