Waferpedia

Comparison ledger

80 Plus versus Plasmalab 800 Plus

Oxford Instruments 80 Plus and Oxford Instruments Plasmalab 800 Plus, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
80 PlusOxford Instruments
Plasmalab 800 PlusOxford Instruments
OEMOxford InstrumentsOxford Instruments
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyOxford Instruments 80 PlusOxford Instruments Plasmalab 800
Specifications
Phase3 Phase[1]3+ Neutral / earth[2]
Configuration50/60 Hz[1]Nitride[2]
Voltage415 vAC[1]208 V[2]
Frequency—60 Hz[2]
80 Plus entryPlasmalab 800 Plus entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing