Waferpedia

Comparison ledger

Ion Beam versus OpAL

Oxford Instruments Ion Beam and Oxford Instruments OpAL, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Ion BeamOxford Instruments
OpALOxford Instruments
OEMOxford InstrumentsOxford Instruments
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyOxford Instruments Ion BeamOxford Instruments OpAL
Specifications
ConfigurationDC Hot Wire Filament Ion-Guns[1]Single open loop chamber (non-loadlocked)[2]
Heated table—80-300ºC[2]
Voltage—208V, 3Ph, 60Hz, 25A[2]
Ion Beam entryOpAL entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing