Waferpedia

Comparison ledger

Ionfab 300 Plus IBD versus OpAL

Oxford Instruments Ionfab 300 Plus IBD and Oxford Instruments OpAL, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
Ionfab 300 Plus IBDOxford Instruments
OpALOxford Instruments
OEMOxford InstrumentsOxford Instruments
CategoryDepositionDeposition
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyOxford Instruments Ionfab 300Oxford Instruments OpAL
Specifications
ContaminationII-VI[1]
No longer FunctioningSoftware, Automata[1]
ConfigurationSingle open loop chamber (non-loadlocked)[2]
Heated table80-300ºC[2]
Voltage208V, 3Ph, 60Hz, 25A[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing