Comparison ledger
Panasonic PSX 307, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PSX 307Panasonic | 1300 Series SafetyThermo Fisher |
|---|---|---|
| OEM | Panasonic | Thermo Fisher |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2026 Third-party support only |
| Control system | — | — |
| Generation | — | — |
| Family | Panasonic PSX 307 | Thermo Fisher 1300 |
| Specifications | ||
| Configuration | 50/60 Hz[1] | Class II[4] |
| Electric Source | 200 / 208 / 220 / 230 / 240 V[1] | — |
| Model | PSX 307[1] | — |
| Equipment type | Plasma Cleaner[1] | — |
| Category | Wet Processing / Clean[2] | — |
| Cleaning method | Parallel plate RF back-sputtering method[3] | — |
| Gas for electrical discharge | Ar (option: O2)[3] | — |
| Pneumatic source | 0.49 MPa or more, 6.5 L/min (A.N.R.)[3] | — |
| Power source | 1-phase AC 200 V, 2.00 kVA (Full Load 5.00 kVA)[3] | — |
| Compatible voltage | 1-phase 208 / 220 / 230 / 240 V[3] | — |
| Dimensions / mass (base configuration) | W 930 mm × D 1 100 mm × H 1 450 mm / 555 kg[3] | — |
| Dimensions / mass (S type transfer system) | W 2 113 mm × D 1 100 mm × H 1 450 mm / 850 kg[3] | — |
| Dimensions / mass (M type transfer system) | W 2 266 mm × D 1 100 mm × H 1 450 mm / 725 kg[3] | — |
| Speed | Up to 360 substrates/strips per hour[3] | — |
| Compliance | Semi S2/S8 compliance[3] | — |
| Certification | CE certified[3] | NSF/ANSI 49, UL, CE[6] |
| Model number | NM-EFP1A[3] | — |
| Cabinet type | — | Class II, Type A2 biological safety cabinet[5] |
| Airflow compensation | — | SmartFlow airflow compensation system[5] |
| Motors | — | Dual DC motors[5] |
| Front window design | — | SmartClean front window design[5] |
| Control panel | — | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[5] |
| UV light | — | Programmable UV light[5] |
| SmartPort | — | SmartPort convenience for routing tubing and cables through the side walls[5] |
| Available widths | — | 3-foot, 4-foot, 5-foot, and 6-foot sizes[5] |
| Front opening choices | — | 8-inch or 10-inch front opening[5] |
| Filter specification | — | H14 HEPA filters, EN 1822, 99.995% @ MPPS[6] |
| Service valves | — | Up to 6 total, 3 on each side wall[6] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →