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Panasonic

PSX 307

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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Panasonic PSX 307 is a plasma cleaner for PCBs with automatic transfer. The Panasonic PSX 307 uses a parallel plate RF back-sputtering cleaning method. The Panasonic PSX 307 is specified for 1-phase AC 200 V power and compatible with 1-phase 208 / 220 / 230 / 240 V.[1]

PSX 307 — Inventory photo
Fig. 01PSX 307Inventory photo[2]

Power

50/60 Hz[2]

Optics

NM-EFP1A[1]

What it is

The Panasonic PSX 307 is a plasma cleaner for wet processing and clean applications in microelectronics.[4]

The PSX307 Plasma Cleaner is a parallel plate plasma cleaner for PCBs with automatic transfer.[1][5]

How it works

The PSX307 uses a parallel plate RF back-sputtering method.[1][5]

The PSX307 can use argon discharge gas, and the discharge gas can optionally be oxygen.[1][5]

Where it fits in the process flow

General reference — not yet source-verified

A plasma cleaner normally sits in the surface-preparation part of a process flow before bonding, coating, overmolding, or other downstream assembly steps.

Applications

The PSX307 is used for surface modification of PCBs.[1][5]

The PSX307 is used to improve mold resin adhesion and under-fill wettability, and to reduce peel-off, voids, and cracks.[1][5]

The PSX307 is also used for argon plasma treatment of ultra-thin gold-plated electrodes to support reliable wire bonding.[1][5]

What do the numbers mean?

Power & electrical6

50/60 Hz[2]
Accurate?
Electric Source
200 / 208 / 220 / 230 / 240 V[2]
Accurate?
Cleaning method
Parallel plate RF back-sputtering method[1]
Accurate?
Gas for electrical discharge
Ar (option: O2)[1]
Accurate?
Power source
1-phase AC 200 V, 2.00 kVA (Full Load 5.00 kVA)[1]
Accurate?
Compatible voltage
1-phase 208 / 220 / 230 / 240 V[1]
Accurate?

Wafer handling3

Dimensions / mass (S type transfer system)
W 2 113 mm × D 1 100 mm × H 1 450 mm / 850 kg[1]
Accurate?
Dimensions / mass (M type transfer system)
W 2 266 mm × D 1 100 mm × H 1 450 mm / 725 kg[1]
Accurate?
Speed
Up to 360 substrates/strips per hour[1]
Accurate?

Optics & imaging1

Model number
NM-EFP1A[1]
Accurate?

Dimensions & facilities1

Dimensions / mass (base configuration)
W 930 mm × D 1 100 mm × H 1 450 mm / 555 kg[1]
Accurate?

Configuration & options6

Model
PSX 307[2]
Accurate?
Equipment type
Plasma Cleaner[2]
Accurate?
Category
Wet Processing / Clean[4]
Accurate?
Pneumatic source
0.49 MPa or more, 6.5 L/min (A.N.R.)[1]
Accurate?
Compliance
Semi S2/S8 compliance[1]
Accurate?
Certification
CE certified[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/60 Hz[2]
  • Electric Source200 / 208 / 220 / 230 / 240 V[2]
  • Cleaning methodParallel plate RF back-sputtering method[1]
  • Gas for electrical dischargeAr (option: O2)[1]
  • Power source1-phase AC 200 V, 2.00 kVA (Full Load 5.00 kVA)[1]
  • Compatible voltage1-phase 208 / 220 / 230 / 240 V[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the model number of the PSX307 Plasma Cleaner?

The model number is NM-EFP1A.[1][5]

What cleaning method does the PSX307 use?

The PSX307 uses a parallel plate RF back-sputtering method.[1][5]

What gas is used for electrical discharge in the PSX307?

The PSX307 uses argon for electrical discharge, with oxygen as an option.[1][5]

Not publicly documented

The following facts about the PSX 307 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PSX 307 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the PSX 307 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the PSX 307 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the PSX 307 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the PSX 307 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]eu.connect.panasonic.com — eu.connect.panasonic.comeu.connect.panasonic.com
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]waferpedia.com — waferpedia.comwaferpedia.com
  5. [5]PSX307 Plasma Cleaner | Panasonic Connect Asia — ap.connect.panasonic.comap.connect.panasonic.com
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Last updated Oct 13, 2026.

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