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03 RR 8120-001-001 Wafer ExchangerversusPA 300 ProbeShield Probing

Rorze 03 RR 8120-001-001 Wafer Exchanger, SUSS MicroTec PA 300 ProbeShield Probing, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMRorzeSUSS MicroTec
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyRorze 03 RR 8120-001-001 Wafer ExchangerSUSS MicroTec PA 300
Specifications
Wafer size8 inch[1]—
ManufacturerRorze[1]—
Model03 RR 8120-001-001[1]—
Equipment typeWafer Exchanger[1]—
Configuration—Velox 2.2.3.23[3]
Chuck—12-inch nickel plated aluminum chuck[4]
Control unit—ATT M300 Control Unit[4]
Microscope—Cascade CMPS-888 Microscope[4]
Micropositioners—Suss PH150 Micropositioner 3ea[3]
Optics—10X,2X Mitutoyo Plan Apo Objective 2ea[4]
Failure mode—Error57 No Motor Power (possible defective Motion Drive Board)[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com