Waferpedia

SUSS MicroTec

PA 300 ProbeShield Probing

Test & ProbeSUSS MicroTec PA 300 family
Research Quality: 30% complete
PA 300 ProbeShield Probing — Inventory photo
Fig. 01PA 300 ProbeShield ProbingInventory photo[1]

What is it?

The SUSS PA 300 ProbeShield Probing Station is a probing station configured with a 12-inch nickel plated aluminum chuck, an ATT M300 control unit, a Cascade CMPS-888 microscope, and SUSS PH150 micropositioners.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Error57 No Motor Power (possible defective Motion Drive Board)

What do the numbers mean?

Wafer handling1

12" Nickel Plated Aluminum Chuck[1]
Accurate?

Optics & imaging1

10X,2X Mitutoyo Plan Apo Objective 2ea[1]
Accurate?

Control & software1

ATT M300 Control Unit[1]
Accurate?

Configuration & options4

Velox 2.2.3.23[1]
Accurate?
Cascade CMPS-888 Microscope[1]
Accurate?
Suss PH150 Micropositioner 3ea[1]
Accurate?
Error57 No Motor Power (possible defective Motion Drive Board)[1]
Accurate?
Interested in this tool?
Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the PA 300 ProbeShield Probing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PA 300 ProbeShield Probing are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the PA 300 ProbeShield Probing are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the PA 300 ProbeShield Probing are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the PA 300 ProbeShield Probing is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the PA 300 ProbeShield Probing are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
Was this page accurate?

Last updated Jul 29, 2026.

Compare with similar tools

View all →