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03 RR 8120-001-001 Wafer ExchangerversusOpti-Probe 2600

Rorze 03 RR 8120-001-001 Wafer Exchanger, Thermawave Opti-Probe 2600, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
Opti-Probe 2600Thermawave
OEMRorzeThermawave
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyRorze 03 RR 8120-001-001 Wafer Exchanger—
Cited variants—
Specifications
Wafer size8 inch[2]—
ManufacturerRorze[2]—
Model03 RR 8120-001-001[2]—
Equipment typeWafer Exchanger[2]—
Wafer Size Compatibility—4- to 8-inches[4]
Laser—675nm thermoelectrically cooled diode laser[4]
Spectrometry lamp—450 to 840 nm tungsten halogen lamp[4]
BPR range—thick dielectric films > 500A[4]
BPE range—thin dielectric films < 500A[4]
Resolution—150nm[4]
Product type—Thin Film Measurement System[5]
Version—200[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]metrologyequipmentservices.commetrologyequipmentservices.com
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]nanoxkorea.comnanoxkorea.com
  5. [5]fabsurplus.comfabsurplus.com