Waferpedia

Thermawave

Opti-Probe 2600

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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

ThermawaveOpti-Probe 2600
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What is it?

The Therma-Wave Opti-Probe 2600 is used for measurement of optical parameters such as film thickness of multiple layers and index of refraction. The system supports Beam Profile Reflectometry (BPR) and Beam Profile Ellipsometry (BPE) modes.

What do the numbers mean?

Power & electrical1

Laser
675nm thermoelectrically cooled diode laser[1]
Accurate?

Wafer handling1

Wafer Size Compatibility
4- to 8-inches[1]
Accurate?

Optics & imaging2

Spectrometry lamp
450 to 840 nm tungsten halogen lamp[1]
Accurate?
Resolution
150nm[1]
Accurate?

Configuration & options2

BPR range
thick dielectric films > 500A[1]
Accurate?
BPE range
thin dielectric films < 500A[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Optiprobe 2600BReferenced as a film measurement system variant in the spare-parts source.metrologyequipmentservices.com[2]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Laser675nm thermoelectrically cooled diode laser[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Opti-Probe 2600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Opti-Probe 2600 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Opti-Probe 2600 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Opti-Probe 2600 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Opti-Probe 2600 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Opti-Probe 2600 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]nanoxkorea.comnanoxkorea.comnanoxkorea.com
  2. [2]metrologyequipmentservices.commetrologyequipmentservices.commetrologyequipmentservices.com
  3. [3]Thermawave Optiprobe 2600evsemi.comevsemi.com
  4. [4]Thermawave Opti-Probe 2600 Thin Film Measurement System for salefabsurplus.comfabsurplus.com
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Last updated Jul 29, 2026.

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