Waferpedia

Comparison ledger

SCP 9400 Batch Wafer Processingversus1300 Series Safety

Santa Clara Plastics SCP 9400 Batch Wafer Processing, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1300 Series SafetyThermo Fisher
OEMSanta Clara PlasticsThermo Fisher
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2026 Third-party support only
Control system——
Generation——
FamilySanta Clara Plastics SCPThermo Fisher 1300
Specifications
ConfigurationRCA Clean[1]Class II[4]
ManufacturerSanta Clara Plastics[1]—
ModelSCP 9400[1]—
Equipment nameSCP 9400 Batch Wafer Processing[1]—
CategoryWet Processing / Clean[2]—
Wafer size8 inch[1]—
Tool typebatch wafer processing system[2]—
Process description8-inch RCA clean tool[2]—
Current equipment statusAvailable[3]—
Current configuration200mm[3]—
Date of manufacture1998-03-16[3]—
DescriptionWet hood[3]—
SoftwareSys 4000 Ver 9.8.1 Patch A[3]—
Cabinet type—Class II, Type A2 biological safety cabinet[5]
Airflow compensation—SmartFlow airflow compensation system[5]
Motors—Dual DC motors[5]
Front window design—SmartClean front window design[5]
Control panel—Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[5]
UV light—Programmable UV light[5]
SmartPort—SmartPort convenience for routing tubing and cables through the side walls[5]
Available widths—3-foot, 4-foot, 5-foot, and 6-foot sizes[5]
Front opening choices—8-inch or 10-inch front opening[5]
Filter specification—H14 HEPA filters, EN 1822, 99.995% @ MPPS[6]
Certification—NSF/ANSI 49, UL, CE[6]
Service valves—Up to 6 total, 3 on each side wall[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]macquarie.commacquarie.com
  4. [4]inventory listing
  5. [5]thermofisher.comthermofisher.com
  6. [6]documents.thermofisher.comdocuments.thermofisher.com