Waferpedia

Comparison ledger

SU 3200 Single Wafer Processingversus1070

SCREEN SU 3200 Single Wafer Processing, Signatone 1070, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1070Signatone
OEMSCREENSignatone
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySCREEN SU 3200Signatone 1070
Specifications
Configuration12 Chamber Aquaspin[1]—
Factory InterfaceFOUP (4)[1]—
Handler SystemKawasaki[1]—
Software VersionStandard[1]—
CIMSECS / GEMS[1]—
ProcessSOM / SPM / SC1/ SC2 / 03W / DHF[1]—
Software versionP2485STD00V2485STD00[2]—
System power rating208AC-3 Phase[2]—
Wafer size12 inch (300 mm)[1]—
Maximum chambers12 chambers in four three-level towers[3]—
Throughputup to 800 wafers per hour (WPH)[3]—
Chemical supply optionsdynamic direct injection (DDI) or cabinet-type chemical supply system[3]—
Chamber volume reductionabout one-third of the previous model[3]—
ProcessesSOM / SPM / SC1/ SC2 / 03W / DHF[1]—
Power rating208AC-3 Phase[2]—
Make—Signatone[4]
Model—1070[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]screen.co.jpscreen.co.jp
  4. [4]Equipment inventory listing