Comparison ledger
SCREEN SU 3200 Single Wafer Processing, Tenney , TPS JR-A-F4T Junior compact temperature test chambers, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | SCREEN | Tenney |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN SU 3200 | Tenney , TPS JR-A-F4T Junior compact temperature test chambers |
| Specifications | ||
| Configuration | 12 Chamber Aquaspin[1] | — |
| Factory Interface | FOUP (4)[1] | — |
| Handler System | Kawasaki[1] | — |
| Software Version | Standard[1] | — |
| CIM | SECS / GEMS[1] | — |
| Process | SOM / SPM / SC1/ SC2 / 03W / DHF[1] | — |
| Software version | P2485STD00V2485STD00[2] | — |
| System power rating | 208AC-3 Phase[2] | — |
| Wafer size | 12 inch (300 mm)[1] | — |
| Maximum chambers | 12 chambers in four three-level towers[3] | — |
| Throughput | up to 800 wafers per hour (WPH)[3] | — |
| Chemical supply options | dynamic direct injection (DDI) or cabinet-type chemical supply system[3] | — |
| Chamber volume reduction | about one-third of the previous model[3] | — |
| Processes | SOM / SPM / SC1/ SC2 / 03W / DHF[1] | — |
| Power rating | 208AC-3 Phase[2] | — |
| Chamber Size | — | 1.2 cubic feet[4] |
| Temperature Range | — | -68°C to +180°C[4] |
| Control | — | +/-1.0°C[4] |
| Manufacturer | — | Tenney[4] |
| Model | — | JR-A-F4T[4] |
| Short description | — | Junior compact temperature test chambers[4] |
| Control accuracy | — | +/-1.0°C[4] |
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