Comparison ledger
Semitool 003163-000 SRD, SUSS MicroTec SD 12 Semi-Automatic Wet Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 003163-000 SRDSemitool | SD 12 Semi-Automatic Wet ProcessingSUSS MicroTec |
|---|---|---|
| OEM | Semitool | SUSS MicroTec |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 003163-000 SRD | SUSS MicroTec SD 12 Semi-Automatic Wet Processing |
| Specifications | ||
| Make | Semitool[1] | — |
| Model | 003163-000[1] | SD 12 Semi-Automatic Wet Processing[2] |
| Equipment type | Spin Rinse Dryer (SRD)[1] | — |
| Asset # | 139375[1] | — |
| Last Confirm Date | September 03, 2025[1] | — |
| Configuration | — | IPC With Touch Screen[2] |
| Operating System, | — | Microsoft Windows 10[2] |
| Speed | — | Up to 3.000 rpm (Depending on Substrate Size and Load)[2] |
| Acceleration | — | Programmable[2] |
| Spinning Time | — | 0.1 up to 999s[2] |
| OEM | — | SUSS[2] |
| Control interface | — | IPC with touch screen[2] |
| Process chamber | — | Stainless steel[2] |
| Dispense arm | — | Motorized[2] |
| Connection | — | Ethernet link[2] |
| Safety package | — | Solvent[2] |
| Back side rinse | — | Included[2] |
| Drying | — | Nitrogen drying[2] |
| Filter unit | — | Solvent filter unit[2] |
| Media storage | — | SS EX[2] |
| Solvent developer insert ring | — | R6-R8-BSR[2] |
| Power | — | 50/60 Hz, 3x400 VAC[2] |
| Spinning time | — | 0.1 to 999 s[2] |
| CDA purge | — | Included for spin light tower[2] |
| Tool status display | — | Red, yellow, blue[2] |
| Vacuum chuck | — | R6 with exchangeable centering pins for 150 mm and 152 mm round SEMI standard wafers[2] |
| Pressure tank system | — | 10 L stainless steel tank with empty, low, full, and overfull sensors; quick connector for manual filling; pressure regulated with gauge; maximum pressure 2.5 bar[2] |
| Waste canister | — | 20 L stainless steel waste tank with full and overfull level sensor; spill pan with leakage sensor included[2] |
| Tape frame vacuum chuck | — | For 150 mm wafer[2] |
| Dispense system | — | FFKM dispense system 660 / Puddle & FANSPRAY[2] |
| Max Pressure | — | 2.5 bar[2] |
| Wafer size | — | For 150 mm Wafer FFKM[2] |
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