SUSS MicroTec
SD 12 Semi-Automatic Wet Processing
The SUSS SD 12 Semi-Automatic Wet Processing System is a semi-automatic wet processing system. The SUSS SD 12 Semi-Automatic Wet Processing System includes an IPC with touch screen and Microsoft Windows 10. The SUSS SD 12 Semi-Automatic Wet Processing System supports spin speeds up to 3,000 rpm.[1]
Wafer size
150mm
Power
50/60 Hz, 3x400 VAC[1]
Vacuum
Gauge For Chuck Vacuum Controller[1]
Gas delivery
Safety Package Solvent[1]
What it is
General reference — not yet source-verifiedWet processing systems carry out liquid chemical steps on substrates in a controlled chamber. Semi-automatic wet processing tools are commonly used for dispense, rinse, develop, clean, and dry sequences that rely on timed fluid delivery and substrate handling.
Where it fits in the process flow
General reference — not yet source-verifiedWet processing systems are used at steps in wafer and substrate fabrication where a liquid chemical operation is required between deposition, coating, exposure, etch, or inspection stages. Semi-automatic tools of this class are commonly placed in process modules for resist development, solvent cleaning, rinsing, and drying before the substrate moves to the next patterned or film-processing step.
What do the numbers mean?
Power & electrical2
- 50/60 Hz, 3x400 VAC[1]
Vacuum & pumping5
- Gauge For Chuck Vacuum Controller[1]
- Vacuum chuck
- R6 with exchangeable centering pins for 150 mm and 152 mm round SEMI standard wafers[1]
- Pressure tank system
- 10 L stainless steel tank with empty, low, full, and overfull sensors; quick connector for manual filling; pressure regulated with gauge; maximum pressure 2.5 bar[1]
Wafer handling2
Gas & chemistry6
Control & software3
- Suss MCC Tool Control Software[1]
Dimensions & facilities2
- Including CDA Purge for Spin[1]
Configuration & options23
- IPC With Touch Screen[1]
- Process Chamber Made of Stainless Steel[1]
- Motorized Dispense Arm[1]
- Ethernet Link[1]
- Back Side Rinse[1]
- Nitrogen Drying[1]
- Media Storage SS EX[1]
- Technical Data:[1]
- Light Tower[1]
- Waste canister
- 20 L stainless steel waste tank with full and overfull level sensor; spill pan with leakage sensor included[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationGauge For Chuck Vacuum Controller[1]
- ConfigurationSafety Package Solvent[1]
- ConfigurationFilter Unit Solvent[1]
- ConfigurationSolvent Developer Insert Ring R6-R8-BSR[1]
- Configuration50/60 Hz, 3x400 VAC[1]
- Safety packageSolvent[1]
- Filter unitSolvent filter unit[1]
- Solvent developer insert ringR6-R8-BSR[1]
- Power50/60 Hz, 3x400 VAC[1]
- Vacuum chuckR6 with exchangeable centering pins for 150 mm and 152 mm round SEMI standard wafers[1]
- Pressure tank system10 L stainless steel tank with empty, low, full, and overfull sensors; quick connector for manual filling; pressure regulated with gauge; maximum pressure 2.5 bar[1]
- Tape frame vacuum chuckFor 150 mm wafer[1]
- Max Pressure2.5 bar[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the SD 12 Semi-Automatic Wet Processing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SD 12 Semi-Automatic Wet Processing are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SD 12 Semi-Automatic Wet Processing are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SD 12 Semi-Automatic Wet Processing are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SD 12 Semi-Automatic Wet Processing are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SD 12 Semi-Automatic Wet Processing is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
Last updated Oct 16, 2026.
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