Comparison ledger
Semitool 003163-000 SRD, YES R3A-LMC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 003163-000 SRDSemitool | R3A-LMCYES |
|---|---|---|
| OEM | Semitool | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 003163-000 SRD | YES R3A-LMC |
| Specifications | ||
| Make | Semitool[1] | — |
| Model | 003163-000[1] | R3A-LMC[2] |
| Equipment type | Spin Rinse Dryer (SRD)[1] | — |
| Asset # | 139375[1] | — |
| Last Confirm Date | September 03, 2025[1] | — |
| Designed for | — | fast, uniform cleaning of lead frames and carrier borne devices loaded into one or two open-sided magazines[2] |
| Chamber design | — | parallel plate design[2] |
| Plasma uniformity | — | uniform plasma throughout the magazine[2] |
| Plasma modes | — | Active Plasma mode, RIE Plasma, Electron-free Plasma[2] |
| Plasma direction | — | left to right, right to left, or from both sides simultaneously[2] |
| Plasma gas inputs | — | two plasma gas inputs[2] |
| Back-fill gas input | — | provided for venting the chamber back to atmospheric pressure in an inert atmosphere, normally nitrogen[2] |
| Diagnostics display | — | plain English[2] |
| Readouts | — | plain English[2] |
| Function | — | Automatic plasma cleaning of lead frames and Auer boats[2] |
| Target products | — | Lead frames and carrier borne devices loaded into one or two open-sided magazines[2] |
| Design | — | Parallel plate design[2] |
| Gas inputs | — | Two plasma gas inputs[2] |
| Control/readout language | — | Plain English readouts and diagnostics[2] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →