Comparison ledger
STS Multiplex ICP ASE Advanced Silicon Etch (ASE), Tegal 110, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 110Tegal | |
|---|---|---|
| OEM | STS | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | STS Multiplex ICP | Tegal 110 |
| Cited variants |
| |
| Specifications | ||
| Configuration | Currently configured for 150 mm wafers[1] | — |
| Voltage | 208V, 60Hz, 50A 3 phase[1] | — |
| Make | STS[1] | — |
| Model | Multiplex ICP ASE[1] | — |
| Wafer Sizes | 6 inch[1] | — |
| Configured wafer size | 150 mm wafers[1] | — |
| Load lock | Manual load lock[1] | — |
| Wafer handling | Manual load lock – Carousel Loader[4] | — |
| Backside cooling | He Backside Cooling 150mm clamp configuration[1] | — |
| RF power supply | ENI 300/30 Watt 13.56MHz RF power supply[1] | — |
| Upper electrode RF power supply | ENI ACG-10B 1KW 13.56MHz RF Upper Electrode power supply[1] | — |
| Turbo pump | Leybold Mag 2000CT Turbo pump with Leybold Mag Drive Controller[1] | — |
| Gas panel | OnBoard gas panel – 4 MFCs[1] | — |
| Electrical | 208V, 60Hz, 50A 3 phase[1] | — |
| Category | Etch[4] | — |
| Process architecture | Inductively coupled plasma etch architecture[4] | — |
| Option | MAC Cassette to Cassette Loader can be an option[1] | — |
| model | — | 110 SE[3] |
| application focus | — | process development applications[3] |
| process capability | — | deep silicon plasma etching[3] |
| capabilities | — | very high aspect ratio trench etch and profile control[3] |
| configuration | — | multiple configurations with minimum technical intervention[3] |
| System type | — | plasma etch system[5] |
| Supported components | — | MEMS and 3D-IC components[3] |
| Control capability | — | very high aspect ratio trench etch and profile control[5] |
| Physical description | — | compact[3] |
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