Comparison ledger
Sumitomo SEN NV GSD III 180 High Current Ion, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 160 XP IonVarian | |
|---|---|---|
| OEM | Sumitomo | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Sumitomo SEN | Varian 160 XP Ion |
| Specifications | ||
| Phase | 3 Phase[1] | — |
| Configuration | 200 Volt[1] | 150mm High Current IMP[3] |
| Frequency | 50 Hz[2] | — |
| Power | 50 kVA[2] | — |
| Manufacturer | Sumitomo[1] | — |
| Model | SEN NV GSD III 180[1] | 160 XP Ion[4] |
| Tool type | High current ion implanter[1] | ion implanter[3] |
| Wafer size | 6 inch[1] | — |
| Electrical phase | 3 Phase[2] | — |
| Electrical input | 200 Volt[2] | — |
| Vintage | 2003[1] | — |
| OEM | — | Varian[4] |
| Category | — | Ion Implantation[3] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →