Comparison ledger
Sumitomo SHX Ion, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SHX IonSumitomo | 160 XPVarian |
|---|---|---|
| OEM | Sumitomo | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Sumitomo SHX Ion | Varian 160 XP |
| Cited variants | — |
|
| Specifications | ||
| Configuration | With:[2] | — |
| Configuration & options | Chiller[3] | — |
| Vacuum & pumping | Trans CRYO-Compressor ×2[3] | — |
| Included equipment | Chiller; Trans CRYO-Compressor ×2[2] | — |
| Manufacturer | Sumitomo[2] | — |
| Model | SHX[2] | — |
| Category | Ion Implantation[4] | — |
| Configuration (160 XP Ion variant) | — | 150mm High Current IMP[1] |
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