Comparison ledger
SUSS MicroTec 150 e Mask, SUSS MicroTec MA 150 M EL MA Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 150 e MaskSUSS MicroTec | MA 150 M EL MA MaskSUSS MicroTec |
|---|---|---|
| OEM | SUSS MicroTec | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1993 Vintage year |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec 150 e Mask | SUSS MicroTec MA 150 |
| Specifications | ||
| Voltage | — | 220V[1] |
| Configuration | — | 1800 VA[2] |
| Frequency | — | 60 Hz[1] |
| Wafer Size | — | 6 inch[2] |
| Power | — | 1800 VA[2] |
| Manufacturer | — | SUSS MicroTec[1] |
| Model | — | MA 150 M EL MA Mask[2] |
| Tool type | — | mask aligner[1] |
| Vintage year | — | 1993[2] |
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