Comparison ledger
SUSS MicroTec PM5, Tenney , TPS JR-A-F4T Junior compact temperature test chambers, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PM5SUSS MicroTec | |
|---|---|---|
| OEM | SUSS MicroTec | Tenney |
| Category | Test & Probe | Test & Probe |
| Wafer size | 150mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec PM5 | Tenney , TPS JR-A-F4T Junior compact temperature test chambers |
| Specifications | ||
| system type | analytical probe system[1] | — |
| wafer/substrate diameter | up to 150 mm (6″)[1] | — |
| measurement modes | DC and HF measurements[1] | — |
| failure analysis use | suitable as a failure analysis tool[1] | — |
| probe heads | up to 12 SUSS probe heads at one time[1] | — |
| manipulator probe function | nanowires may be picked and placed onto a device or substrate[1] | — |
| Measurement types | DC and HF[1] | — |
| Max probe heads | up to 12 SUSS probe heads[1] | — |
| Manipulator probe | for nanowire pick-and-place[1] | — |
| Wafer/substrate diameter | up to 150 mm (6 in)[1] | — |
| Failure analysis | suitable as a failure analysis tool[1] | — |
| Contact points | up to 4 contact points can be operated independently at the same time[2] | — |
| Manufacturer | SÜSS MicroTec AG[2] | Tenney[3] |
| Category | Characterization[2] | — |
| Supported substrate diameter | up to 150 mm (6 in)[1] | — |
| Supported wafers, chips, and substrates | wafers, chips and substrates up to 150 mm[2] | — |
| Maximum probe heads | up to 12 SUSS probe heads at one time[1] | — |
| Nanowire handling | nanowires may be picked and placed onto a device or substrate[1] | — |
| Probe head motion | X, Y, Z movements[2] | — |
| Platen height adjustment | up to 40 mm[2] | — |
| Additional contact separation | 200 μm[2] | — |
| Microscope objectives | ExtraLongWorkingDistance 2x, 10x, 20x objectives and 10x ocular[2] | — |
| Chuck stage motion | X, Y and Z moved[2] | — |
| Chuck stage thermal control | can be heated/cooled[2] | — |
| Chamber Size | — | 1.2 cubic feet[3] |
| Temperature Range | — | -68°C to +180°C[3] |
| Control | — | +/-1.0°C[3] |
| Model | — | JR-A-F4T[3] |
| Short description | — | Junior compact temperature test chambers[3] |
| Control accuracy | — | +/-1.0°C[3] |
Plan your fab
Building a Test & Probe process? Get a complete equipment list.
Open the fab equipment planner →