SUSS MicroTec

PM5

Test & Probe 150mm SUSS MicroTec PM5 family

Research Quality: 30% complete

Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What is it?

The SUSS PM5 analytical probe system is described as a probe station for precise analysis of devices fabricated on wafers and substrates measuring up to 150 mm (6″) in diameter. It can be used for DC and HF measurements, supports failure analysis, allows up to 12 SUSS probe heads at one time, and includes a manipulator probe for picking and placing nanowires onto a device or substrate.

What can it run?

Process applications and technology nodes documented for this tool.

precise analysis of devices fabricated on wafers and substrates
DC measurements
HF measurements
failure analysis
nanowire pick-and-place onto a device or substrate

What do the numbers mean?

Wafer handling2

wafer/substrate diameter: up to 150 mm (6″)^[1]
manipulator probe function: nanowires may be picked and placed onto a device or substrate^[1]

Configuration & options4

system type: analytical probe system^[1]
measurement modes: DC and HF measurements^[1]
failure analysis use: suitable as a failure analysis tool^[1]
probe heads: up to 12 SUSS probe heads at one time^[1]

Interested in this tool?

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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the PM5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PM5 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PM5 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PM5 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PM5 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PM5 is not on record.
Answerable by: an OEM datasheet or a fab qualification report