SUSS MicroTec
PM5
The SUSS PM5 is an analytical probe system for precise analysis of devices fabricated on wafers and substrates up to 150 mm. The SUSS PM5 can be used for DC and HF measurements and supports failure analysis. The SUSS PM5 allows the use of up to 12 SUSS probe heads at one time.[1][2]
What it is
The SUSS MicroTec PM5 is an analytical probe system for precise analysis of devices fabricated on wafers and substrates up to 150 mm in diameter. The SUSS MicroTec PM5 is used for electrical measurements on wafers, chips, and substrates. The SUSS MicroTec PM5 supports DC and HF measurements. The SUSS MicroTec PM5 is also suitable for failure analysis.[1][3][4]
How it works
The SUSS MicroTec PM5 uses a chuck to hold the device under test by vacuum. The SUSS MicroTec PM5 uses microscope viewing during setup. The SUSS MicroTec PM5 allows movement of the chuck, platen, and probe heads to bring needles into contact with device pads. The SUSS MicroTec PM5 connects the needles through the probe head arms to BNC cables for measurement with external electronic instrumentation. The SUSS MicroTec PM5 can operate up to 4 contact points independently at the same time. The SUSS MicroTec PM5 has four SUSS ProbeHeads placed on the platen, with space for additional probes if necessary.[3]
The SUSS MicroTec PM5 can use up to 12 SUSS probe heads at one time. The SUSS MicroTec PM5 can also use a manipulator probe for picking and placing nanowires onto a device or substrate.[1]
Where it fits in the process flow
Applications
The SUSS MicroTec PM5 is used for electrical characterization of fabricated devices on wafers and substrates. The SUSS MicroTec PM5 is used for DC measurements, HF measurements, and failure analysis. The SUSS MicroTec PM5 can also support manipulator-based placement of nanowires onto a device or substrate.[1][2]
- precise analysis of devices fabricated on wafers and substrates
- DC measurements
- HF measurements
- failure analysis
- nanowire pick-and-place onto a device or substrate
What do the numbers mean?
Wafer handling8
Optics & imaging1
Dimensions & facilities1
Configuration & options15
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What sample formats can the SUSS MicroTec PM5 handle?
The SUSS MicroTec PM5 is used on wafers, chips, and substrates up to 150 mm in diameter.[1][3][4]
What kinds of measurements does the SUSS MicroTec PM5 support?
The SUSS MicroTec PM5 supports DC and HF measurements.[1][3]
How many probe heads can the SUSS MicroTec PM5 use?
The SUSS MicroTec PM5 allows the use of up to 12 SUSS probe heads at one time.[1]
Can the SUSS MicroTec PM5 support nanowire handling?
The SUSS MicroTec PM5 can use a manipulator probe to pick and place nanowires onto a device or substrate.[1]
Not publicly documented
The following facts about the PM5 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PM5 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the PM5 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PM5 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PM5 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PM5 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]uwaterloo.ca — uwaterloo.cauwaterloo.ca
- [2]PM5 — SUSS MicroTec | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]polifab.polimi.it — polifab.polimi.itpolifab.polimi.it
- [4]SUSS MicroTec PM5 family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 20, 2026.
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