Comparison ledger
Tegal 1512e, Tokyo Electron Act 8 Metal, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1512eTegal | Act 8 MetalTokyo Electron |
|---|---|---|
| OEM | Tegal | Tokyo Electron |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tegal 1512e | Tokyo Electron Act |
| Specifications | ||
| Tool type | Industrial RIE plasma etcher system[1] | — |
| Stated configuration | With modules assembly for CI-4222[1] | — |
| Configuration | — | 2 chamber DPS Metal[2] |
| Gas | — | PGMEA, HMDS, TMAH[2] |
| OS | — | Lynx[2] |
| Missing | — | TH unit sight glas, thermocon circulator, spin motor driver[2] |
| DPS Metal chambers | — | 2[2] |
| ASP+ chambers | — | 2[2] |
| Orienter/degas modules | — | 2[2] |
| Operating system | — | Lynx[2] |
| Process gases | — | PGMEA, HMDS, TMAH[2] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →