Comparison ledger
Tegal 1512e, Tokyo Electron Telius SCCM Oxide, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1512eTegal | Telius SCCM OxideTokyo Electron |
|---|---|---|
| OEM | Tegal | Tokyo Electron |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tegal 1512e | Tokyo Electron Telius SCCM Oxide |
| Specifications | ||
| Tool type | Industrial RIE plasma etcher system[1] | — |
| Stated configuration | With modules assembly for CI-4222[1] | — |
| Vintage | — | 2004[2] |
| OEM | — | Tokyo Electron[3] |
| Model | — | Telius SCCM[3] |
| Category | — | Etch[2] |
| Wafer size | — | 12 inch[3] |
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