Waferpedia

Comparison ledger

, TPS JR-A-F4T Junior compact temperature test chambersversusOpti-Probe 2600

Tenney , TPS JR-A-F4T Junior compact temperature test chambers, Thermawave Opti-Probe 2600, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
Opti-Probe 2600Thermawave
OEMTenneyThermawave
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyTenney , TPS JR-A-F4T Junior compact temperature test chambers—
Cited variants—
Specifications
Chamber Size1.2 cubic feet[2]—
Temperature Range-68°C to +180°C[2]—
Control+/-1.0°C[2]—
ManufacturerTenney[2]—
ModelJR-A-F4T[2]—
Short descriptionJunior compact temperature test chambers[2]—
Control accuracy+/-1.0°C[2]—
Wafer Size Compatibility—4- to 8-inches[3]
Laser—675nm thermoelectrically cooled diode laser[3]
Spectrometry lamp—450 to 840 nm tungsten halogen lamp[3]
BPR range—thick dielectric films > 500A[3]
BPE range—thin dielectric films < 500A[3]
Resolution—150nm[3]
Product type—Thin Film Measurement System[4]
Version—200[4]

Plan your fab

Building a Test & Probe process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]metrologyequipmentservices.commetrologyequipmentservices.com
  2. [2]dealer listingwotol.com
  3. [3]nanoxkorea.comnanoxkorea.com
  4. [4]fabsurplus.comfabsurplus.com