Comparison ledger
Tenney , TPS JR-A-F4T Junior compact temperature test chambers, Tokyo Electron Precio Nano, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Precio NanoTokyo Electron | |
|---|---|---|
| OEM | Tenney | Tokyo Electron |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | Auto Alignment System (Needle Tip, Wafer) |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tenney , TPS JR-A-F4T Junior compact temperature test chambers | Tokyo Electron Precio |
| Specifications | ||
| Chamber Size | 1.2 cubic feet[1] | — |
| Temperature Range | -68°C to +180°C[1] | — |
| Control | +/-1.0°C[1] | — |
| Manufacturer | Tenney[1] | Tokyo Electron[3] |
| Model | JR-A-F4T[1] | Precio Nano[3] |
| Short description | Junior compact temperature test chambers[1] | — |
| Control accuracy | +/-1.0°C[1] | — |
| Configuration | — | PSAS (Precio Standard Application Software)[2] |
| Wafer size | — | Auto Alignment System (Needle Tip, Wafer)[2] |
| Loader | — | Single/Wide/Opener/Right[2] |
| Chuck Top | — | HOT[2] |
| Chuck Force | — | 300 kg[2] |
| WAPP | — | STD (1 plate)[2] |
| PTD (Probe Tip Detector) | — | 150C[2] |
| GPIB | — | I/F w/Cable 4m[2] |
| OCR (Wafer ID) | — | FOCUS[2] |
| LCD Panel | — | WAGON[2] |
| Category | — | Test & Probe[3] |
| Wafer size / system type | — | Auto Alignment System (Needle Tip, Wafer)[3] |
| Probing accuracy | — | ±0.8 µm[4] |
| Probing force | — | 300/400 kg[4] |
| Optical system | — | ASU/BCU-Ⅱ[4] |
| PSAS | — | Precio Standard Application Software[2] |
| Chuck camera unit | — | Chuck Camera Unit -II[2] |
| Bridge camera unit | — | Bridge Camera Unit -II[2] |
| Alarm monitor | — | Alarm Monitor[2] |
| Real-time wafer map display | — | Real Time Wafer Map Display[2] |
| Inspections | — | Auto/Manual, Probe Mark/Needle Tip[2] |
| Base DD head plate | — | 480 SQ[2] |
| PTD | — | 150C[2] |
| OCR | — | FOCUS[2] |
| Software version | — | Nzz00-P016.12-A[2] |
| System type | — | Auto Alignment System (Needle Tip, Wafer)[3] |
| Vintage | — | 2010 Vintage[5] |
| Stage technology | — | Linear motor[4] |
| XY probing accuracy | — | ±0.8 µm[4] |
| Z probing accuracy | — | ±5.0 µm[4] |
Plan your fab
Building a Test & Probe process? Get a complete equipment list.
Open the fab equipment planner →