Tokyo Electron

Precio Nano

Test & Probe Auto Alignment System (Needle Tip, Wafer)Tokyo Electron Precio family

Research Quality: 10% complete

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Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Wafer size

Auto Alignment System (Needle Tip, Wafer)

Optics

Bridge Camera Unit -II^[1]

What is it?

What do the numbers mean?

Wafer handling7

Wafer size: Auto Alignment System (Needle Tip, Wafer)^[1]; Chuck Camera Unit -II^[1]
Wafer size: Real Time Wafer Map Display^[1]
Loader: Single/Wide/Opener/Right^[1]
Chuck Top: HOT^[1]
Chuck Force: 300 kg^[1]
OCR (Wafer ID): FOCUS^[1]

Optics & imaging2

Bridge Camera Unit -II^[1]
PTD (Probe Tip Detector): 150C^[1]

Control & software1

PSAS (Precio Standard Application Software)^[1]

Accurate?

Configuration & options7

Alarm Monitor^[1]; Inspections (Auto/Manual, Probe Mark/Needle Tip)^[1]; Base DD Head Plate (480 SQ)^[1]
WAPP: STD (1 plate)^[1]
GPIB: I/F w/Cable 4m^[1]
LCD Panel: WAGON^[1]; S/W version is Nzz00-P016.12-A^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Precio Nano are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Precio Nano are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Precio Nano are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Precio Nano are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Precio Nano are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Precio Nano is not on record.
Answerable by: an OEM datasheet or a fab qualification report