Tokyo Electron
Precio Nano
Tokyo Electron Precio Nano is a Test & Probe wafer prober. Tokyo Electron Precio Nano is an auto alignment system for needle tip and wafer. Tokyo Electron Precio Nano has a probing accuracy of ±0.8 µm.[1][2]
Wafer size
Auto Alignment System (Needle Tip, Wafer)
Performance
±0.8 µm[2]
Optics
Bridge Camera Unit -II[3]
What it is
How it works
Where it fits in the process flow
General reference — not yet source-verifiedThe Precio Nano sits in wafer test and probe operations. The tool is used where wafers are contacted for electrical probing and inspection before downstream use or further test handling.
What do the numbers mean?
Wafer handling12
- Chuck Camera Unit -II[3]
Optics & imaging4
- Bridge Camera Unit -II[3]
Performance3
Control & software3
- PSAS (Precio Standard Application Software)[3]
Dimensions & facilities1
Configuration & options17
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Why test at the wafer stage?General reference — not yet source-verified
Wafer-stage testing helps identify good and bad devices before later assembly steps, reducing the use of downstream process time on material that does not meet electrical requirements.
What is the main function of probing hardware in this class?General reference — not yet source-verified
The probing hardware provides controlled, repeatable electrical contact between the measurement system and the target features on the wafer.
Not publicly documented
The following facts about the Precio Nano are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Precio Nano are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Precio Nano are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Precio Nano are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Precio Nano are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Precio Nano is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]flason-smt.com — flason-smt.comflason-smt.com
- [3]inventory listing
- [4]Equipment inventory listing
Last updated Oct 13, 2026.
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