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MB 80 Mini Brute Diffusionversus0332 F 9453 302 Diffusion

Thermco MB 80 Mini Brute Diffusion, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMThermcoVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyThermco MB 80Varian 0332 F 9453 302 Diffusion
Cited variants
  • MB 80 Mini Brute Diffusion[1]
—
Specifications
Configuration6.5 Bore[2]—
Temperature1200°C[2]—
ManufacturerThermco[2]—
ModelMB 80[2]0332 F 9453 302[6]
TypeDiffusion furnace[3]—
Maximum temperature1200°C[2]—
Process capacityUp to 6 in. wafers[4]—
Furnace typeHorizontal tube atmospheric furnace system[4]—
ProcessesOxidation, annealing, alloying[4]—
ControlManually controlled by the user[4]—
Atmosphere featuresForming gas purge and water bubbler for wet oxidation applications[4]—
Tube size6 in. dia. inside dimension[5]—
ControllerDigital programmable controller[5]—
Temperature range400°C to +1300°C[5]—
Asset Number—142841[6]
Last Confirm Date—October 14, 2025[7]
Make—Varian[6]
Category—Thermal / Diffusion[8]
Tool type—diffusion pump[8]

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Sources (8)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]cores.research.asu.educores.research.asu.edu
  5. [5]yorkscientific.comyorkscientific.com
  6. [6]Equipment inventory listing
  7. [7]fab-spares.comfab-spares.com
  8. [8]waferpedia.comwaferpedia.com