Comparison ledger
Thermo Fisher 1300 Series Safety, YES R3A-LMC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1300 Series SafetyThermo Fisher | R3A-LMCYES |
|---|---|---|
| OEM | Thermo Fisher | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2026 Third-party support only | — |
| Control system | — | — |
| Generation | — | — |
| Family | Thermo Fisher 1300 | YES R3A-LMC |
| Specifications | ||
| Configuration | Class II[1] | — |
| Cabinet type | Class II, Type A2 biological safety cabinet[2] | — |
| Airflow compensation | SmartFlow airflow compensation system[2] | — |
| Motors | Dual DC motors[2] | — |
| Front window design | SmartClean front window design[2] | — |
| Control panel | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[2] | — |
| UV light | Programmable UV light[2] | — |
| SmartPort | SmartPort convenience for routing tubing and cables through the side walls[2] | — |
| Available widths | 3-foot, 4-foot, 5-foot, and 6-foot sizes[2] | — |
| Front opening choices | 8-inch or 10-inch front opening[2] | — |
| Filter specification | H14 HEPA filters, EN 1822, 99.995% @ MPPS[3] | — |
| Certification | NSF/ANSI 49, UL, CE[3] | — |
| Service valves | Up to 6 total, 3 on each side wall[3] | — |
| Model | — | R3A-LMC[4] |
| Designed for | — | fast, uniform cleaning of lead frames and carrier borne devices loaded into one or two open-sided magazines[4] |
| Chamber design | — | parallel plate design[4] |
| Plasma uniformity | — | uniform plasma throughout the magazine[4] |
| Plasma modes | — | Active Plasma mode, RIE Plasma, Electron-free Plasma[4] |
| Plasma direction | — | left to right, right to left, or from both sides simultaneously[4] |
| Plasma gas inputs | — | two plasma gas inputs[4] |
| Back-fill gas input | — | provided for venting the chamber back to atmospheric pressure in an inert atmosphere, normally nitrogen[4] |
| Diagnostics display | — | plain English[4] |
| Readouts | — | plain English[4] |
| Function | — | Automatic plasma cleaning of lead frames and Auer boats[4] |
| Target products | — | Lead frames and carrier borne devices loaded into one or two open-sided magazines[4] |
| Design | — | Parallel plate design[4] |
| Gas inputs | — | Two plasma gas inputs[4] |
| Control/readout language | — | Plain English readouts and diagnostics[4] |
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