Comparison ledger
Tokyo Electron Clean Track Lithius Pro Z i Resist, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Clean Track Lithius Pro Z i ResistTokyo Electron | 1000PYES |
|---|---|---|
| OEM | Tokyo Electron | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Tokyo Electron Clean Track | YES 1000P |
| Specifications | ||
| Configuration | Multi Block[1] | Parallel plate[4] |
| T&H Controller | Customer Provided[1] | — |
| Chemical Filter | Customer Provided[1] | — |
| Ingenio GL License | OEM Support/Buyer[1] | — |
| DEV | PTD:[1] | — |
| DEV Nozzle | MGP[1] | — |
| Rinse Nozzle | ADR Nozzles[1] | — |
| NTD Nozzle | IDN Nozzle[1] | — |
| Wafer Size | 12 inch[1] | — |
| Tool Type | Coater / Developer[2] | — |
| COT (Coating) Pump | With MACRD Pump, Direct Drain[1] | — |
| BTC (BARC) Pump | With MACRD Pump, Direct Drain[1] | — |
| ITC (Intermediate Coating) Pump | With MACRD Pump, Direct Drain, CCSS[1] | — |
| DEV PTD Nozzle | MGP Nozzle[1] | — |
| DEV PTD Rinse Nozzle | ADR Nozzles[1] | — |
| DEV NTD Nozzle | IDN Nozzle, CCSS[1] | — |
| PIR (Post-Imaging Resist) Nozzle | IDR Nozzle, CCSS[1] | — |
| OEM | Tokyo Electron[1] | — |
| Model | Clean Track Lithius Pro Z i Resist[1] | 1000P[3] |
| Vacuum | With MACRD Pump, Direct Drain[2] | — |
| Gas delivery | Customer Provided[2] | — |
| System type | — | Plasma cleaning system[3] |
| Shelf configuration | — | Four 16 x 16 inch shelves[3] |
| Total capacity | — | 1024 square inches[3] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[3] |
| Number of shelves | — | 4[3] |
| Shelf size | — | 16 x 16 inches[3] |
| Power | — | 1000 W[4] |
| Operation modes | — | Active, RIE, Downstream[3] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[3] |
| Type | — | Plasma cleaning system[3] |
| Shelves | — | Four 16 x 16 inch shelves[3] |
| Control | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[3] |
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