YES
1000P
The Glen/YES 1000P is a plasma cleaning system with a 1000 watt parallel plate configuration. The 1000P uses four 16x16 inch shelves providing a total capacity of 1024 square inches. The 1000P is PLC-driven with plain English real-time process readout and diagnostics.[1][2]
What it is
The YES 1000P is a plasma cleaning system in the Glen/YES R-Series product range. The YES 1000P has four sixteen inch by sixteen inch shelves for a total capacity of one thousand twenty four square inches. The YES 1000P is PLC driven with plain English real time process readout and diagnostics in the event of system abort.[1]
How it works
R-Series plasma cleaning systems are multi-shelf systems. R-Series plasma cleaning systems combine plasma uniformity with interchange between Active, RIE, or Downstream operation for electron-free cleaning of sensitive electronic components.[1]
Where it fits in the process flow
General reference — not yet source-verifiedPlasma cleaning tools are commonly placed before assembly or patterning steps that depend on strong adhesion, reliable electrical connection, or low surface contamination. Plasma cleaning tools are also used as preparation steps before deposition, bonding, packaging, and other operations where surface condition strongly affects yield and repeatability.
What can it run?
Process applications and technology nodes documented for this tool.
- Low volume R&D
- High volume production
- Plasma cleaning
- Surface modification
What do the numbers mean?
Control & software3
Configuration & options12
- Parallel plate[2]
Vintage & configurations
- 1998-03Acquisition[1]
YES acquired Glen Technologies, integrating the 1000P (originally Glen model) into YES product line
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the total processing area of the YES 1000P?
The YES 1000P has four shelves of 16 by 16 inches each, for a total capacity of 1024 square inches.[1]
Is the YES 1000P PLC driven?
The system is PLC driven with plain English real time process readout and diagnostics in the event of system abort.[1]
What are the common applications of the YES 1000P?
The YES 1000P is used for plasma cleaning, surface modification, adhesion improvement (e.g., polyethylene to stainless steel, gold to quartz), and wiring to semiconductor chips in hybrid circuits.[1]
Not publicly documented
The following facts about the 1000P are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the 1000P are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 1000P are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1000P are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1000P is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 1000P are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]semistarcorp.com — semistarcorp.comsemistarcorp.com
Last updated Oct 20, 2026.
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