Comparison ledger
Varian 0216 7696, E 11368072 ESC, Varian Viision 80, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Viision 80Varian | |
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 0216 7696, E 11368072 ESC | Varian Viision 80 |
| Specifications | ||
| Configuration | Platen ADV-S Type[1] | Medium Current[3] |
| Type | ESC Platen ADV-S Type[1] | — |
| Category | Ion Implantation[2] | Ion Implantation[4] |
| Voltage | — | 208 V[3] |
| Phase | — | 3 Phase[3] |
| Power | — | 45 kW[3] |
| Make | — | Varian[3] |
| Model | — | Viision 80[3] |
| Wafer Sizes | — | 8 inch[3] |
| Electrical | — | 208 V, 3 Phase, 5 Wire[3] |
| Vintage | — | 2000[3] |
| OEM | — | Varian[3] |
| Wafer size | — | 8 inch[3] |
| Beam current class | — | Medium Current[4] |
| Beam current | — | Up to 2000 µA[5] |
| Energy range | — | 12 to 300 keV[5] |
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