Comparison ledger
Varian 0332 F 9453 302 Diffusion, YES 450 PB Polyimide, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | Varian | YES |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 0332 F 9453 302 Diffusion | YES 450 |
| Cited variants | — |
|
| Specifications | ||
| Asset Number | 142841[2] | — |
| Last Confirm Date | October 14, 2025[3] | — |
| Make | Varian[2] | — |
| Model | 0332 F 9453 302[2] | — |
| Category | Thermal / Diffusion[4] | — |
| Tool type | diffusion pump[4] | — |
| Phase | — | 3 Phase[5] |
| Configuration | — | 50/60 Hz[5] |
| Voltage | — | 208 Vac[5] |
| Equipment type | — | Polyimide bake oven[6] |
| Wafer size | — | 8 inch[5] |
| Line frequency | — | 50/60 Hz[5] |
| Input voltage | — | 208 Vac[5] |
| Heating temperature | — | heats ambient to 450 deg C[1] |
| Cassette capacity | — | holds 2 cassettes of 8-inch wafers[1] |
| Process chamber ID | — | 9.4 W x 18.1 D x 9.8[1] |
| Atmosphere | — | N2/VACUUM[1] |
| Filter | — | 100 micron laminar flow filter[1] |
| Power | — | 3 Phase[6] |
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