Waferpedia

YES

450 PB Polyimide

Thermal / DiffusionYES 450 family
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The YES 450 PB Polyimide is a bake oven. The YES 450 PB Polyimide is for 8-inch wafers. The YES 450 PB Polyimide is specified at 3-phase, 50/60 Hz, 208 Vac.[1][2][3]

450 PB Polyimide — Inventory photo
Fig. 01450 PB PolyimideInventory photo[1]

Power

3 Phase[1]

Vacuum

N2/VACUUM[3]

What it is

General reference — not yet source-verified

Bake ovens in semiconductor processing provide controlled heating for wafer-based materials and films. Polyimide bake ovens are used where a process needs uniform thermal treatment in an enclosed chamber rather than on an open hot plate.

How it works

General reference — not yet source-verified

Wafer bake ovens heat substrates inside an enclosed chamber to drive solvent removal, film densification, cure reactions, or other temperature-dependent changes in deposited materials. Chamber ovens commonly use filtered gas flow and controlled atmosphere options to reduce contamination and to support processes that benefit from inert or reduced-pressure conditions.

Where it fits in the process flow

General reference — not yet source-verified

Thermal bake ovens are placed in wafer process flows wherever a coated or deposited layer requires a controlled heat treatment between patterning, deposition, or etch steps. Polyimide bake steps commonly follow coating and soft-bake operations and can precede later lithography, etch, metallization, or passivation sequences depending on the device flow.

Applications

The YES 450 PB Polyimide is intended for polyimide bake processing.[1][2]

What do the numbers mean?

Power & electrical6

Phase
3 Phase[1]
Accurate?
50/60 Hz[1]
Accurate?
Voltage
208 Vac[1]
Accurate?
Line frequency
50/60 Hz[1]
Accurate?
Input voltage
208 Vac[1]
Accurate?
Power
3 Phase[2]
Accurate?

Vacuum & pumping1

Atmosphere
N2/VACUUM[3]2 sources
Accurate?

Wafer handling2

Wafer size
8 inch[1]
Accurate?
Cassette capacity
holds 2 cassettes of 8-inch wafers[3]2 sources
Accurate?

Configuration & options4

Equipment type
Polyimide bake oven[2]
Accurate?
Heating temperature
heats ambient to 450 deg C[3]2 sources
Accurate?
Process chamber ID
9.4 W x 18.1 D x 9.8[3]2 sources
Accurate?
Filter
100 micron laminar flow filter[3]2 sources
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
YES 450PB 8-2P-CP——N2/VACUUM, 100 micron filter, polyimide oven, holds 2 cassettes of 8-inch wafers, process chamber ID 9.4 W x 18.1 D x 9.8, heats ambient to 450 deg C.jmind.com[3]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[1]
  • Configuration50/60 Hz[1]
  • Voltage208 Vac[1]
  • Line frequency50/60 Hz[1]
  • Input voltage208 Vac[1]
  • AtmosphereN2/VACUUM[3]
  • Power3 Phase[2]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the YES 450 PB Polyimide?

The YES 450 PB Polyimide is a bake oven.[2]

What wafer size is the YES 450 PB Polyimide configured for?

The YES 450 PB Polyimide is for 8-inch wafers.[1][2]

What electrical service is specified for the YES 450 PB Polyimide?

The YES 450 PB Polyimide is specified at 3-phase, 50/60 Hz, 208 Vac.[1][2]

What chamber and cassette details are given for the YES 450PB 8-2P-CP?

The YES 450PB 8-2P-CP holds 2 cassettes of 8-inch wafers, and the process chamber ID is 9.4 W x 18.1 D x 9.8.[3][2]

Not publicly documented

The following facts about the 450 PB Polyimide are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 450 PB Polyimide are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 450 PB Polyimide are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 450 PB Polyimide are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 450 PB Polyimide is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 450 PB Polyimide are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]jmind.com — jmind.comjmind.com
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Last updated Oct 16, 2026.

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