Comparison ledger
Veeco NT 3300 SU 2D 3D Profiler, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000FPYES | |
|---|---|---|
| OEM | Veeco | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Veeco NT 3300 | YES 1000FP |
| Specifications | ||
| Configuration | 200mm Stage with Encoders[1] | — |
| Make | Veeco / Wyko[1] | — |
| Model | NT 3300 SU[1] | Glen/YES 1000FP[3] |
| Wafer Sizes | 6, 8 inch[1] | — |
| Stage | 200mm stage with encoders[1] | — |
| Motorized XYZ | Yes[1] | — |
| Motorized Turret | Yes[1] | — |
| Auto Focus | Yes[1] | — |
| Stitching | Yes[1] | — |
| Full Automation Capability | Yes[1] | — |
| Resolution | Sub-nanometer[1] | — |
| Z-range | Large Z-range[1] | — |
| Characterization | 2D and 3D characterization and visualization[1] | — |
| Gauge-capable | Yes[1] | — |
| Range Automation | Yes[1] | — |
| Measure Optics | Measure Optics[2] | — |
| Wafer sizes | 6 inch, 8 inch[1] | — |
| Motion | Motorized XYZ[1] | — |
| Turret | Motorized turret[1] | — |
| Focus | Auto focus[1] | — |
| Automation | Full automation capability[1] | — |
| System type | — | Plasma cleaning system[3] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[3] |
| Designed use | — | Designed to accept a range of shelf sizes[3] |
| Application focus | — | Changing needs of the flat panel industry[3] |
| Multi-shelf design | — | Multi-shelf system[4] |
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