Comparison ledger
Zeiss Axio CSM 700, Zeiss Axioscope 7, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Axio CSM 700Zeiss | Axioscope 7Zeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss Axio | Zeiss Axioscope |
| Cited variants | — | |
| Specifications | ||
| Configuration | with controller[2] | With:[4] |
| Microscope type | Confocal microscope[3] | Upright microscope[1] |
| Scanning stage travel range | 150 x 150 mm[3] | — |
| Measurement rate | More than 100 frames per second[3] | — |
| Step height measurement range | 20 nm up to the millimetre range[3] | — |
| Depth of focus | Previously only offered by scanning electron microscopes (SEMs)[3] | — |
| Software analysis options | Measurement of roughness, evaluation of layer thickness, particle analysis[3] | — |
| Mosaic function | Captures large sample areas with a stitching algorithm that eliminates transitions in the final image[3] | — |
| Imperial units integration | Inches and microinches integrated into software[3] | — |
| Type | Confocal microscope[3] | — |
| Imaging | Three-dimensional visualization in true colour at high resolution[3] | — |
| Topographical measurement rate | More than 100 frames per second[3] | — |
| Step height range | From 20 nm up to the millimetre range[3] | — |
| Make | — | Zeiss[4] |
| Model | — | Axioscope 7[4] |
| Configuration options | — | Transmitted light brightfield, reflected-light bright field and dark field, epi-fluorescence, and complete system variants[1] |
| Applications described | — | Advanced materials and life science imaging[5] |
| Objective range | — | 1.25x-100x[5] |
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