Axio CSM 700

Confocal microscopes are optical inspection and measurement tools used to image surface structure and collect height information from small features. Confocal microscopes are commonly used when noncontact examination of topography, texture, defects, or layer-related surface features is needed.

The Axio CSM 700 visualizes surfaces three-dimensionally in true colour at high resolution. The Axio CSM 700 performs topographical measurements at a rate of more than 100 frames per second. The Axio CSM 700 has a motorized scanning stage with a 150 x 150 mm travel range. The Axio CSM 700 reliably detects height information on relatively soft surfaces with step heights from 20 nm up to the millimetre range. The Axio CSM 700 includes integrated scanning stage control in its software. The Axio CSM 700 includes a Mosaic function that captures large sample areas with a stitching algorithm that eliminates transitions in the final image.^[1]

Optical metrology and inspection microscopes are used after process steps that create or modify surface features, because those steps often need confirmation of topography and visual condition. Optical metrology and inspection microscopes are also used during failure analysis, process development, and quality checks where noncontact review of patterned or finished surfaces is preferred.

The Axio CSM 700 is suited to materials research, quality inspection, and routine applications. The Axio CSM 700 provides analysis options for measurement of roughness, evaluation of layer thickness, and particle analysis. The Axio CSM 700 allows large sample areas to be captured, which supports determination of parameters such as roughness and wear rate with higher statistical reliability. The Axio CSM 700 software integrates inches and microinches, which aids compliance with material microscopy standards used in parts of North America.^[1]