Comparison ledger
Zeiss Axio and Zeiss CrossBeam 550, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | AxioZeiss | CrossBeam 550Zeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | Windows |
| Generation | — | — |
| Family | Zeiss Axio | Zeiss CrossBeam 550 |
| Specifications | ||
| Configuration | with Axiocam MRC camera[1] | — |
| Column | — | GEMINI II electron optical column[2] |
| Stage | — | 5-axes motorized stage (X, Y, Z (M), Tilt and Rotation)[2] |
| Airlock | — | Semi-automatic airlock[2] |
| Vibration compensation | — | Active suspensions to compensate for vibrations[2] |
| Control software | — | Zeiss SmartSEM software[2] |
| Control interface | — | Controlled via a dual joystick and a dedicated control panel; PC with two monitors[2] |
| Detector | — | InLens SE detector[2] |
| Available software for offline analysis and metrology | — | ProSEM software, MountainsMap 8.2 (coupled to 3DSM Metrology), SmartStitch[2] |
| Reserved use | — | Exclusively reserved for imaging dedicated to control of processes done in CMi by regular CMi users[2] |
| Sample holders | — | Carousel 9x10mm, multi-pin holder, Wafer Section, 4 Inch Wafer, 6 Inch Wafer, 6 Inch Mask[2] |
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