Zeiss
CrossBeam 550
Plate 01ZEISS Crossbeam 550: Your FIB-SEM for High Throughput 3D Analysis and Sample Preparation
ZEISS MicroscopyWatch on YouTubePlate 02ISTFA Tools of the Trade 2024: ZEISS Crossbeam 550 Samplefab
ASM InternationalWatch on YouTubePlate 03Zeiss Crossbeam 550 SEM Basic Training
Allen HunterWatch on YouTube
Optics
GEMINI II electron optical column[1]
Control era
Windows
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- Imaging dedicated to process control
- Offline analysis and metrology
- High-resolution SE imaging
- Topography imaging
- Material contrast imaging
- Compositional contrast examinations
- Non-conductive sample imaging
- Angle-selective material characterization
- BSE imaging
Why won't it start?
Documented failure modes, common issues, and field considerations.
- The tool is exclusively reserved for imaging dedicated to process control by regular CMi users.
- Penalty charges apply for unused booking, late cancellations, and mismatch between booked name and operator name.
What do the numbers mean?
Wafer handling1
- Sample holders
- Carousel 9x10mm, multi-pin holder, Wafer Section, 4 Inch Wafer, 6 Inch Wafer, 6 Inch Mask[1]
Optics & imaging6
Control & software4
- Control interface
- Controlled via a dual joystick and a dedicated control panel; PC with two monitors[1]
- Available software for offline analysis and metrology
- ProSEM software, MountainsMap 8.2 (coupled to 3DSM Metrology), SmartStitch[1]
- Reserved use
- Exclusively reserved for imaging dedicated to control of processes done in CMi by regular CMi users[1]
Configuration & options3
Vintage & configurations
Control-system eraWindows[1]
What replaced it?
Related models
- siblingZeiss Merlin— The basic training notes differences between the SEM Crossbeam and SEM MERLIN, and state that being fully trained on SEM MERLIN is a prerequisite.source[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the CrossBeam 550 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CrossBeam 550 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the CrossBeam 550 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The process node or technology generation of the CrossBeam 550 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the CrossBeam 550 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the CrossBeam 550 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]epfl.ch — epfl.chepfl.ch
Last updated Jul 29, 2026.
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