Waferpedia

Comparison ledger

Axio versus O Inspect 322 CMM

Zeiss Axio and Zeiss O Inspect 322 CMM, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
AxioZeiss
O Inspect 322 CMMZeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyZeiss AxioZeiss O Inspect 322 CMM
Cited variants—
  • O-INSPECT 3 / 2 / 2[1]
Specifications
Configurationwith Axiocam MRC camera[2]Measuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[3]
P/N—636520-9932-000[1]
Axio entryO Inspect 322 CMM entry

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]inventory listing