Comparison ledger
Zeiss Axioplan2 and Zeiss Merlin, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | Axioplan2Zeiss | MerlinZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 4" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss Axioplan2 | Zeiss Merlin |
| Specifications | ||
| Manufacturer | Zeiss[1] | — |
| Model | Axioplan2[1] | — |
| Listed as | Linewidth2 Zeiss Axioplan2 Measuring System[1] | — |
| Instrument type | — | Scanning electron microscope (SEM)[2] |
| Column | — | GEMINI II[2] |
| Stage | — | 5-axis motorized stage (X, Y, Z, Tilt and Rotation)[2] |
| Loadlock | — | Semi-automatic airlock[2] |
| Control software | — | ZeissSmartSEM[2] |
| Available holders | — | mono samples, cleaved samples, and full 4 inch wafer[2] |
| Detectors | — | In-Lens, HE-SE2, EsB, and EDX detector[2] |
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