Comparison ledger
Zeiss Axioplan2 and Zeiss O Inspect 322 CMM, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | Axioplan2Zeiss | O Inspect 322 CMMZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss Axioplan2 | Zeiss O Inspect 322 CMM |
| Cited variants | — |
|
| Specifications | ||
| Manufacturer | Zeiss[2] | — |
| Model | Axioplan2[2] | — |
| Listed as | Linewidth2 Zeiss Axioplan2 Measuring System[2] | — |
| Configuration | — | Measuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[3] |
| P/N | — | 636520-9932-000[1] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →