Waferpedia

Comparison ledger

Axioplan2 versus sem2

Zeiss Axioplan2 and Zeiss sem2, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
sem2Zeiss
OEMZeissZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size200mm
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyZeiss Axioplan2Zeiss sem2
Specifications
ManufacturerZeiss[1]
ModelAxioplan2[1]sem2[1]
Listed asLinewidth2 Zeiss Axioplan2 Measuring System[1]
OEMZeiss[1]
Equipment nameZeiss 200 mm Scanning Electron Microscope[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]nanolab.berkeley.edunanolab.berkeley.edu