Comparison ledger
Zeiss Axioscope 5 and Zeiss Merlin, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | Axioscope 5Zeiss | MerlinZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 4" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss Axioscope | Zeiss Merlin |
| Cited variants |
| — |
| Specifications | ||
| Configuration | 100-240V[4] | — |
| Transmitted light illumination | 10W LED or Halogen 50W[3] | — |
| Fluorescence light illumination | Colibri 3, Viluma 5/7, HXP 120[3] | — |
| Objective magnifications available | 5X, 10X, 20X, 50X, 100X[5] | — |
| Transmitted light power source | 100-240V, 50/60 Hz, 120VA[4] | — |
| Field of view (with ergophototube) | 23 mm or 25 mm[6] | — |
| Z focus | Manual[3] | — |
| Recommended software | Labscope, ZEN[3] | — |
| Recommended cameras | Color: Axiocam 208 color, Axiocam 212 color, Axiocam 305 color; Monochrome: Axiocam 202 mono, Axiocam 203 mono, Axiocam 305 mono[3] | — |
| Instrument type | — | Scanning electron microscope (SEM)[7] |
| Column | — | GEMINI II[7] |
| Stage | — | 5-axis motorized stage (X, Y, Z, Tilt and Rotation)[7] |
| Loadlock | — | Semi-automatic airlock[7] |
| Control software | — | ZeissSmartSEM[7] |
| Available holders | — | mono samples, cleaved samples, and full 4 inch wafer[7] |
| Detectors | — | In-Lens, HE-SE2, EsB, and EDX detector[7] |
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